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Topic 1: Plasma etching processes for semiconductors (Si, III-V and III –N,…)
Topic 2: Plasma etching processes for advanced memory technologies
Topic 3: Plasma processes for more than Moore applications
Topic 4: Emerging plasma etching concept and technology
ALE (atomic layer etching)
TSD (topographic selective deposition)
Topic 5: Plasma diagnostic and simulation
New Plasma Sources
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